Novel resistive random access memory device

ABSTRACT

A memory cell includes: a resistive material layer comprising a first portion that extends along a first direction and a second portion that extends along a second direction, wherein the first and second directions are different from each other; a first electrode coupled to a bottom surface of the first portion of the resistive material layer; and a second electrode coupled to the second portion of the resistive material layer.

CROSS-REFERENCE TO RELATED APPLICATION

The present application claims priority to U.S. Provisional PatentApplication No. 62/585,453, filed on Nov. 30, 2017, which isincorporated by reference herein in its entirety.

BACKGROUND

In recent years, unconventional nonvolatile memory (NVM) devices, suchas ferroelectric random access memory (FRAM) devices, phase-changerandom access memory (PRAM) devices, and resistive random access memory(RRAM) devices, have emerged. In particular, RRAM devices, which exhibita switching behavior between a high resistance state and a lowresistance state, have various advantages over conventional NVM devices.Such advantages include, for example, compatible fabrication steps withcurrent complementary-metal-oxide-semiconductor (CMOS) technologies,low-cost fabrication, a compact structure, flexible scalability, fastswitching, high integration density, etc.

As integrated circuits (ICs), which include such RRAM devices, becomemore powerful, it is desirable to maximize the number of the RRAMdevices in the IC accordingly. Generally, an RRAM device includes a topelectrode (e.g., an anode) and a bottom electrode (e.g., a cathode) witha variable resistive material layer interposed therebetween. Forming theRRAM device in such a stack configuration may encounter a limit in termsof maximizing the number of the RRAM devices in the IC because ofvarious reasons. For example, an active area of the variable resistivematerial layer typically extends in parallel with the top/bottomelectrodes, and the number of the RRAM devices is typically proportionalto a number of such active areas. As such, within a given area of theIC, the number of RRAM devices that can be integrated is substantiallylimited. Thus, existing RRAM devices and methods to make the same arenot entirely satisfactory.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that various features are not necessarily drawn to scale. In fact,the dimensions and geometries of the various features may be arbitrarilyincreased or reduced for clarity of discussion.

FIGS. 1A and 1B illustrate a flow chart of a method for forming asemiconductor device, in accordance with some embodiments.

FIG. 2A, 2B, 2C, 2D, 2E, 2F, 2G, 2H, 2I, 2J, and 2K illustratecross-sectional views of a semiconductor device during variousfabrication stages, made by the method of FIG. 1, in accordance withsome embodiments.

FIG. 3 illustrates an example in which the semiconductor device of FIGS.2A-2K is coupled to one or more transistors, in accordance with someembodiments.

FIG. 4 illustrates a top view of a semiconductor device, made by themethod of FIG. 1, in accordance with some embodiments.

FIG. 5 illustrates an alternative structure of the semiconductor deviceof FIGS. 2A-2K, in accordance with some embodiments.

DETAILED DESCRIPTION OF EMBODIMENTS

The following disclosure describes various embodiments for implementingdifferent features of the subject matter. Specific examples ofcomponents and arrangements are described below to simplify the presentdisclosure. These are, of course, merely examples and are not intendedto be limiting. For example, the formation of a first feature over or ona second feature in the description that follows may include embodimentsin which the first and second features are formed in direct contact, andmay also include embodiments in which additional features may be formedbetween the first and second features, such that the first and secondfeatures may not be in direct contact. In addition, the presentdisclosure may repeat reference numerals and/or letters in the variousexamples. This repetition is for the purpose of simplicity and clarityand does not in itself dictate a relationship between the variousembodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

The present disclosure provides various embodiments of a novel RRAMdevice and methods to form the same. In some embodiments, the disclosedRRAM device includes a plurality of RRAM resistors, each of whichincludes an L-shaped variable resistive material layer. Forming such anL-shaped variable resistive material layer in each RRAM resistor mayallow a respective active area of the variable resistive material layerto extend along at least two different directions. In other words, thevariable resistive material layer may include at least two portions thateach extends along respective directions. Accordingly, in someembodiments, each RRAM resistor's top and bottom electrodes may becoupled to respective different portions of the variable resistivematerial layer. As such, within a given area, a number of “integrable”RRAM resistors may be substantially increased.

FIGS. 1A and 1B illustrate a flowchart of a method 100 to form asemiconductor device according to one or more embodiments of the presentdisclosure. It is noted that the method 100 is merely an example, and isnot intended to limit the present disclosure. In some embodiments, thesemiconductor device is, at least part of, an RRAM device. As employedby the present disclosure, the RRAM device refers to any deviceincluding a variable resistive material layer. It is noted that themethod 100 of FIGS. 1A and 1B does not produce a completed RRAM device.A completed RRAM device may be fabricated using complementarymetal-oxide-semiconductor (CMOS) technology. Accordingly, it isunderstood that additional operations may be provided before, during,and after the method 100 of FIGS. 1A and 1B, and that some otheroperations may only be briefly described herein.

Referring first to FIG. 1A, in some embodiments, the method 100 startswith operation 102 in which a substrate with a conductive feature isprovided. In some embodiments, the conductive feature may be ahorizontal interconnection structure form of a metal material (e.g.,copper (Cu)). In some embodiments, the conductive feature may serve as acommon bottom electrode of a plurality of RRAM resistors of the RRAMdevice. The method 100 continues to operation 104 in which one or moredielectric fin structures are formed. In some embodiments, the one ormore dielectric fin structures are fanned on the conductive feature.Further, in some embodiments, each of the one or more dielectric finstructures extends along a vertical direction, perpendicular to a majorsurface of the conductive feature, such that a corner may be formed atan intersection of a sidewall of each dielectric fin structure and themajor surface of the conductive feature.

The method 100 continues to operation 106 in which a first capping layeris formed over the one or more dielectric fin structures and thesubstrate. The method 100 continues to operation 108 in which a variableresistive material layer is formed over the first capping layer. Themethod 100 continues to operation 110 in which a second capping layer isformed over the variable resistive material layer. In some embodiments,the first capping layer, the variable resistive material layer, and thesecond capping layer, formed at operations 106, 108, and 110,respectively, are each substantially conformal and thin. As such, eachof the first capping layer, the variable resistive material layer, andthe second capping layer may follow a profile of the aforementionedcorner (e.g., an L shape), which will be discussed in further detailbelow.

The method 100 continues to operation 112 in which the first cappinglayer, the variable resistive material layer, and the second cappinglayer are patterned. In some embodiments, during such a patterningoperation, portions of the first capping layer, the variable resistivematerial layer, and the second capping layer that are directly coupledto the conductive feature and/or the substrate and disposed relativelyfarther from any of the one or more dielectric fin structures areremoved. As such, the one or more dielectric fin structures, overlaid byrespective portions of the first capping layer, the variable resistivematerial layer, and the second capping layer, are laterally spaced fromone another. In other words, each of the one or more dielectric finstructures may be overlaid by respective “patterned” first cappinglayer, variable resistive material layer, and second capping layer.Furthermore, the patterned first capping layer, the variable resistivematerial layer, and the second capping layer are laterally spaced fromone another.

Referring then to FIG. 1B, the method 100 continues to operation 114 inwhich an isolation layer is formed over the substrate. In someembodiments, the isolation layer overlays a portion of the major surfaceof the conductive feature that are re-exposed after the operation 112,and respective top surfaces of the “patterned” second capping layers.The method 100 continues to operation 116 in which a dielectric layer isformed over the isolation layer. In some embodiments, an optionalanti-reflective coating (ARC) layer may be formed over the dielectriclayer. The method 100 continues to operation 118 in which respective topsurfaces of the one or more dielectric fin structures are exposed. Insome embodiments, a polishing process (e.g., a chemical-mechanicalpolishing (CMP) process) may be performed on respective portions of thedielectric layer, the isolation layer, the second capping layer, thevariable resistive material layer, and the first capping layer until therespective top surfaces of the one or more dielectric fin structures areexposed. The method 100 continues to operation 120 in which a pluralityof recessed regions are formed within the dielectric layer. In someembodiments, a portion of each patterned second capping layer is exposedby one of the plurality of recessed regions, and each of the pluralityof recessed regions is coupled to one patterned variable resistivematerial layer through a respective patterned second capping layer. Themethod 100 continues to operation 122 in which a plurality of upperelectrodes are respectively formed in the recessed regions. In someembodiments, the upper electrodes are each formed by filling therespective recessed region with a conductive material (e.g., copper(Cu)). Accordingly, each upper electrode is coupled to one patternedvariable resistive material layer through a respective patterned secondcapping layer. In some embodiments, after the operation 122, theplurality of RRAM resistors that share the conductive feature as thebottom electrode are formed, which will be discussed in further detailbelow.

In some embodiments, operations of the method 100 may be associated withcross-sectional views of a semiconductor device 200 at variousfabrication stages as shown in FIGS. 2A, 2B, 2C, 2D, 2E, 2F, 2G, 2H, 2I,2J, and 2K, respectively. In some embodiments, the semiconductor device200 may be an RRAM device. The RRAM device 200 may be included in amicroprocessor, memory cell, and/or other integrated circuit (IC). Also,FIGS. 2A through 2K are simplified for a better understanding of theconcepts of the present disclosure. For example, although the figuresillustrate the RRAM device 200, it is understood the IC, in which theRRAM device 200 is formed, may include a number of other devicescomprising resistors, capacitors, inductors, fuses, etc., which are notshown in FIGS. 2A through 2K, for purposes of clarity of illustration.

Corresponding to operation 102 of FIG. 1A, FIG. 2A is a cross-sectionalview of the RRAM device 200 including a substrate 202 with a conductivefeature 204, which is provided, at one of the various stages offabrication, according to some embodiments. Although the RRAM device 200in the illustrated embodiment of FIG. 2A includes only one conductivefeature 204, it is understood that the illustrated embodiment of FIG. 2Aand the following figures are merely provided for illustration purposes.Thus, the RRAM device 200 may include any desired number of conductivefeatures while remaining within the scope of the present disclosure.

In some embodiments, the substrate 202 is a dielectric materialsubstrate formed over various device features (e.g., a source, drain, orgate electrode of a transistor). Such a dielectric material substrate202 may include at least one of: silicon oxide, a low dielectricconstant (low-k) material, other suitable dielectric material, or acombination thereof. The low-k material may include fluorinated silicaglass (FSG), phosphosilicate glass (PSG), borophosphosilicate glass(BPSG), carbon doped silicon oxide (SiO_(x)C_(y)), Black Diamond®(Applied Materials of Santa Clara, Calif.), Xerogel, Aerogel, amorphousfluorinated carbon, Parylene, BCB (bis-benzocyclobutenes), SiLK (DowChemical, Midland, Mich.), polyimide, and/or other future developedlow-k dielectric materials.

In such an embodiment where the substrate 202 includes a dielectricmaterial, the conductive feature 204 may be a horizontal or verticalconductive structure formed within the substrate 202. For example, theconductive feature 204 may be an interconnection structure (i.e., ahorizontal conductive structure), or a via structure (i.e., a verticalconductive structure). Accordingly, the conductive feature 204 may beelectrically coupled to a device feature of a transistor, for example, asource, drain, or gate feature of the transistor that is disposed belowthe tier where the substrate 202 is provided. In some embodiments, theconductive feature 204 may be formed of a metal material (e.g., copper(Cu), aluminum (Al), tungsten (W), etc.).

As mentioned above, the conductive feature 204 may serve as a commonbottom electrode of a plurality of RRAM resistors of the RRAM device200. In some embodiments, when viewed from the top, the conductivefeature may be formed as a stripe to accommodate the plurality of RRAMresistors. Further, a plurality of such stripes, each including aplurality of RRAM resistors, may be each disposed along a row, or acolumn, to form an array of RRAM resistors, which will be discussed infurther detail below with respect to FIG. 4.

Corresponding to operation 104 of FIG. 1A, FIG. 2B is a cross-sectionalview of the RRAM device 200 including a plurality of dielectric finstructures 206, 208 and 210, which are formed, at one of the variousstages of fabrication, according to some embodiments. As shown, in someembodiments, the plurality of dielectric fin structures 206 to 210 areformed on and within an area confined by the conductive feature 204. Andeach of the dielectric fin structures 206 to 210 protrudes beyond amajor surface 205 of the conductive feature 204 and extends along avertical direction, perpendicular to the major surface 205 of theconductive feature 204.

As such, in some embodiments, a plurality of (L-shaped) corners may beeach formed at an intersection of a sidewall of one of the plurality ofdielectric fin structures 206 to 210 and the major surface 205 of theconductive feature 204. For example, a corner 211 is formed at anintersection of one sidewall 206S of the dielectric fin structures 206and the major surface 205, and a corner 213 is formed at an intersectionof the other sidewall 206S of the dielectric fin structures 206 and themajor surface 205; a corner 215 is formed at an intersection of onesidewall 208S of the dielectric fin structures 208 and the major surface205, and a corner 217 is formed at an intersection of the other sidewall208S of the dielectric fin structures 208 and the major surface 205; anda corner 219 is formed at an intersection of one sidewall 210S of thedielectric fin structures 210 and the major surface 205, and a corner221 is formed at an intersection of the other sidewall 210S of thedielectric fin structures 210 and the major surface 205.

In some embodiments, each of the dielectric fin structures 206-210 mayhave a cross-section in any of a variety of shapes, e.g., a polygon.Alternatively stated, when viewed from the top, each of the dielectricfin structures 206-210 presents one of the above-mentioned shapes.However, in some embodiments, the respective sidewalls of eachdielectric fin structure are not directly coupled to each other.Accordingly, the corners 211/213 around the same dielectric finstructure 206 are not directly coupled to each other; the corners215/217 around the same dielectric fin structure 208 are not directlycoupled to each other; and the corners 219/221 around the samedielectric fin structure 210 are not directly coupled to each other. Insome embodiments, each of the dielectric fin structures 206-210 may havean aspect ratio (width/height) of about 0.01 to about 0.5. In someembodiments, a width of each of the dielectric fin structures 206-210may be about 70 nm; and a height of each of the dielectric finstructures 206-210 may be about 140 nm to about 7000 nm. In someembodiments, a spacing between two adjacent dielectric fin structuresamong 206-210 may be about twice the width of each of the dielectric finstructures 206-210, e.g. about 140 nm.

In some embodiments, each of the dielectric fin structures 206-210 maybe formed of an oxide material (e.g., silicon oxide). In someembodiments, the dielectric fin structures 206-210 are formed byperforming at least some of the following processes: using chemicalvapor deposition (CVD), high-density plasma (HDP) CVD, physical vapordeposition (PVD), spin-on coating, and/or other suitable techniques todeposit the oxide material over the substrate 202 and the conductivefeature 204; and performing one or more patterning processes (e.g., alithography process, a dry/wet etching process, a cleaning process, asoft/hard baking process, etc.) to, respectively or simultaneously, formthe dielectric fin structures 206-210.

Corresponding to operation 106 of FIG. 1A, FIG. 2C is a cross-sectionalview of the RRAM device 200 including a first capping layer 224, whichis formed, at one of the various stages of fabrication, according tosome embodiments. As shown, the first capping layer 224 is formed tooverlay the major surface 205 of the conductive feature 204 and each ofthe dielectric fin structures 206-210. In some embodiments, the firstcapping layer 224 is substantially conformal and thin (e.g., about 20-50nm in thickness) so that the first capping layer 224 may follow the Lshape of each of the corners 211 to 221.

In some embodiments, the first capping layer 224 may be formed frommaterials such as, for example, gold (Au), platinum (Pt), ruthenium(Ru), iridium (Ir), titanium (Ti), aluminum (Al), copper (Cu), tantalum(Ta), tungsten (W), iridium-tantalum alloy (Ir—Ta), indium-tin oxide(ITO), or any alloy, oxide, nitride, fluoride, carbide, boride orsilicide of these, such as TaN, TiN, TiAlN, TiW, or a combinationthereof. Although the first capping layer 224 is shown as a single layerin the illustrated embodiment of FIG. 2C (and the following figures), itis noted that the first capping layer 224 may include plural layersformed as a stack, wherein each of the plural layers is formed of one ofthe above-described materials, e.g., TaN, TiN, etc. In some embodiments,the first capping layer 224 is formed by using chemical vapor deposition(CVD), plasma enhanced (PE) CVD, high-density plasma (HDP) CVD,inductively-coupled-plasma (ICP) CVD, physical vapor deposition (PVD),spin-on coating, and/or other suitable techniques to deposit the atleast one of the above-described material over the substrate 202, theconductive feature 204, and the plurality of dielectric fin structures206 to 210.

Corresponding to operation 108 of FIG. 1A, FIG. 2D is a cross-sectionalview of the RRA_M device 200 including a variable resistive materiallayer 226, which is formed, at one of the various stages of fabrication,according to some embodiments. As shown, the variable resistive material226 is formed to overlay the first capping layer 224. In someembodiments, the variable resistive material layer 226 is substantiallyconformal and thin (e.g., about 2-10 nm in thickness) so that the firstvariable resistive material layer 226 may still follow the L shape ofeach of the corners 211 to 221.

In some embodiments, the variable resistive material layer 226 is alayer having a resistance conversion characteristic (e.g. variableresistance). In other words, the variable resistive material layer 226includes material characterized to show reversible resistance variancein accordance with a polarity and/or an amplitude of an appliedelectrical pulse. The variable resistive material layer 226 includes adielectric layer. The variable resistive material layer 226 may bechanged into a conductor or an insulator based on polarity and/ormagnitude of electrical signal.

In one embodiment, the variable resistive layer 226 may include atransition metal oxide. The transition metal oxide maybe denoted asM_(x)O_(y) where M is a transition metal, 0 is oxygen, x is thetransition metal composition, and y is the oxygen composition. In anembodiment, the variable resistive material layer 226 includes ZrO₂.Examples of other materials suitable for the variable resistive materiallayer 226 include: NiO, TiO₂, HfO, ZrO, ZnO, WO₃, CoO, Nb₂O₅, Fe₂O₃,CuO, CrO₂, SrZrO₃ (Nb-doped), and/or other materials known in the art.In another embodiment, the variable resistive layer 226 may include acolossal magnetoresistance (CMR)-based material such as, for example,Pr_(0.7)Ca_(0.3), MnO₃, etc.

In yet another embodiment, the variable resistive layer 226 may includea polymer material such as, for example, polyvinylidene fluoride andpoly[(vinylidenefluoride-co-trifluoroethylene] (P(VDF/TrFE)). In yetanother embodiment, the variable resistive layer 226 may include aconductive-bridging random access memory (CBRAM) material such as, forexample, Ag in GeSe. According to some embodiments, the variableresistive material layer 226 may include multiple layers havingcharacteristics of a resistance conversion material. A set voltageand/or a reset voltage of the variable resistive material layer 226 maybe determined by the variable resistive material layer 226'scompositions (including the values of “x” and “y” in “M_(x)O_(y)” asdiscussed above), thickness, and/or other factors known in the art.

In some embodiments, the variable resistive material layer 226 may beformed by an atomic layer deposition (ALD) technique with a precursorcontaining a metal and oxygen. In some embodiments, other chemical vapordeposition (CVD) techniques may be used. In some embodiments, thevariable resistive material layer 226 may be formed by a physical vapordeposition (PVD) technique, such as a sputtering process with a metallictarget and with a gas supply of oxygen and optionally nitrogen to thePVD chamber. In some embodiments, the variable resistive material layer226 may be formed by an electron-beam deposition technique.

Corresponding to operation 110 of FIG. 1A, FIG. 2E is a cross-sectionalview of the RRAM device 200 including a second capping layer 228, whichis formed, at one of the various stages of fabrication, according tosome embodiments. As shown, the second capping layer 228 is formed tooverlay the variable resistive material layer 226. In some embodiments,the second capping layer 228 is substantially conformal and thin (e.g.,about 20-50 nm in thickness) so that the second capping layer 228 maystill follow the L shape of each of the corners 211 to 221.

In some embodiments, the second capping layer 228 may be formed of asubstantially same material of the first capping layer 224. Thus, thesecond capping layer 228 may be formed from materials such as, forexample, gold (Au), platinum (Pt), ruthenium (Ru), iridium (Ir),titanium (Ti), aluminum (Al), copper (Cu), tantalum (Ta), tungsten (W),iridium-tantalum alloy (Ir—Ta), indium-tin oxide (ITO), or any alloy,oxide, nitride, fluoride, carbide, boride or silicide of these, such asTaN, TiN, TiAlN, TiW, or a combination thereof. Although the secondcapping layer 228 is shown as a single layer in the illustratedembodiment of FIG. 2E (and the following figures), it is noted that thesecond capping layer 228 may include plural layers formed as a stack,wherein each of the plural layers is formed of one of theabove-described materials, e.g., TaN, TiN, etc. In some embodiments, thesecond capping layer 228 is formed by using chemical vapor deposition(CVD), plasma enhanced (PE) CVD, high-density plasma (HDP) CVD,inductively-coupled-plasma (ICP) CVD, physical vapor deposition (PVD),spin-on coating, and/or other suitable techniques to deposit the atleast one of the above-described material over the variable resistivematerial layer 226.

Corresponding to operation 112 of FIG. 1A, FIG. 2F is a cross-sectionalview of the RRAM device 200 in which the first capping layer 224, thevariable resistive material layer 226, and the second capping layer 228are patterned, at one of the various stages of fabrication, according tosome embodiments. According to some embodiments, the first capping layer224, the variable resistive material layer 226, and the second cappinglayer 228 are patterned to remove part of respective horizontal portions(shown in dotted line) that are relatively farther from respectivedielectric fin structures 206 to 210. As such, each of the dielectricfin structures 206 to 210, overlaid by respective “patterned” firstcapping layer 224′, variable resistive material layer 226′, and secondcapping layer 228′, are laterally spaced apart from one another by adistance that may be filled with a portion of re-exposed major surface205. The “patterned” first capping layer 224′, variable resistivematerial layer 226′, and second capping layer 228′, are laterally spacedapart from one another. And, in some embodiments, the patterned firstcapping layer 224′, variable resistive material layer 226′, and secondcapping layer 228′ may still follow the L shape of each of the corners211 to 221.

More specifically, in some embodiments, the patterned first cappinglayer 224′, variable resistive material layer 226′, and second cappinglayer 228′ may each include two vertical portions, extending along thesidewalls (e.g., 206S, 208S, 210S, etc.) of the overlaid dielectric finstructure (e.g., 206, 208, 210, etc.), and two horizontal portions,respectively coupled to the two vertical portions and directlycontacting the conductive feature 204. For purposes of clarity, takingthe patterned first capping layer 224′, variable resistive materiallayer 226′, and second capping layer 228′ overlaying the dielectric finstructure 206 as a representative example, the patterned first cappinglayer 224′ includes two vertical portions 224′-1 extending along thesidewalls 206S, respectively, and two horizontal portions 224′-2respectively coupled to the vertical portions 224′-1 and directlycontacting the conductive feature 204; the patterned variable resistivematerial layer 226′ includes two vertical portions 226′-1 extendingalong the sidewalls 206S, respectively, and two horizontal portions226′-2 respectively coupled to the vertical portions 226′-1 and directlycontacting the conductive feature 204; and the patterned second cappinglayer 228′ includes two vertical portions 228′-1 extending along thesidewalls 206S, respectively, and two horizontal portions 228′-2respectively coupled to the vertical portions 228′-1 and directlycontacting the conductive feature 204.

In some embodiments, the patterning process performed on the firstcapping layer 224, the variable resistive material layer 226, and thesecond capping layer 228 may include: a deposition process to form apatternable layer (e.g., a photoresist layer) over the substrate 202, alithography process to define a profile of the patternable layer, adry/wet etching process to etch respective portions of the first cappinglayer 224, the variable resistive material layer 226, and the secondcapping layer 228 that are not covered by the defined profile of thepatternable layer, a cleaning process, and a soft/hard baking process

Corresponding to operation 114 of FIG. 1A, FIG. 2G is a cross-sectionalview of the RRAM device 200 including an isolation layer 230, which isformed, at one of the various stages of fabrication, according to someembodiments. As shown, the isolation layer 230 is formed to overlay thepatterned first capping layer 224′, variable resistive material layer224′, second capping layer 228′, the re-exposed major surface 205, andthe substrate 202.

In some embodiments, the isolation layer 230 may be silicon carbide,silicon oxynitride, silicon nitride, carbon doped silicon nitride, orcarbon doped silicon oxide. The isolation layer 230 is selected to havea different etch selectivity than a dielectric layer 232 (shown in FIG.2H), which will be discussed below. The isolation layer 230 is depositedover the patterned first capping layer 224′, variable resistive materiallayer 224′, second capping layer 228′, the re-exposed major surface 205,and the substrate 202 using a chemical vapor deposition (CVD) techniquesuch as a plasma enhanced (PE) CVD, a high-density plasma (HDP) CVD, aninductively-coupled-plasma (ICP) CVD, or a thermal CVD technique.

Corresponding to operation 116 of FIG. 1B, FIG. 2H is a cross-sectionalview of the RRAM device 200 including a dielectric layer 232, which isformed, at one of the various stages of fabrication, according to someembodiments. As shown, the dielectric layer 232 is formed to overlay theisolation layer 230. In some embodiments, the dielectric layer 232 has athickness (e.g., about 100 nm˜700 nm) that is substantially higher thana height (e.g., less than about 100 nm) of each of the dielectric finstructures 206 to 210 overlaid by respective patterned first cappinglayer 224′, variable resistive layer 226′, and second capping layer228′, and the isolation layer 230. In some embodiments, ananti-reflective coating (ARC) layer 234 may be optionally formed overthe dielectric layer 232.

In some embodiments, the dielectric layer 232 may include at least oneof: silicon oxide, a low dielectric constant (low-k) material, othersuitable dielectric material, or a combination thereof. The low-kmaterial may include fluorinated silica glass (FSG), phosphosilicateglass (PSG), borophosphosilicate glass (BPSG), carbon doped siliconoxide (SiO_(x)C_(y)), Black Diamond® (Applied Materials of Santa Clara,Calif.), Xerogel, Aerogel, amorphous fluorinated carbon, Parylene, BCB(bis-benzocyclobutenes), SiLK (Dow Chemical, Midland, Mich.), polyimide,and/or other future developed low-k dielectric materials. In someembodiments, the dielectric layer 232 is deposited over the isolationlayer 230 using a chemical vapor deposition (CVD) technique such as aplasma enhanced (PE) CVD, a high-density plasma (HDP) CVD, aninductively-coupled-plasma (ICP) CVD, or a thermal CVD technique.

Corresponding to operation 118 of FIG. 1B, FIG. 21 is a cross-sectionalview of the RRAM device 200 in which top surfaces 206T, 208T, and 210Tof the plurality of dielectric fin structures 206, 208, and 210 arerespectively re-exposed at one of the various stages of fabrication,according to some embodiments. As shown, when the top surfaces 206T to210T are re-exposed, respective top surfaces of the vertical portions224′-1, 226′-1, and 228′-1 of the patterned second capping layer 228′,variable resistive material layer 226′, and first capping layer 224′ arealso exposed. And, in some embodiments, the patterned second cappinglayer 228′, variable resistive material layer 226′, and first cappinglayer 224′ overlaying a respective dielectric fin structure 206, 208 or210 may be separated at two sides of the respective dielectric finstructure.

For example, the patterned second capping layer 228′, variable resistivematerial layer 226′, and first capping layer 224′ overlaying thedielectric fin structure 206 are separated at left-hand and right-handsides of the dielectric fin structure 206; the patterned second cappinglayer 228′, variable resistive material layer 226′, and first cappinglayer 224′ overlaying the dielectric fin structure 208 are separated atleft-hand and right-hand sides of the dielectric fin structure 208; andthe patterned second capping layer 228′, variable resistive materiallayer 226′, and first capping layer 224′ overlaying the dielectric finstructure 210 are separated at left-hand and right-hand sides of thedielectric fin structure 210.

For purposes of clarity, in the following discussions, the patternedsecond capping layer 228′, variable resistive material layer 226′, andfirst capping layer 224′ that are separated at the left-hand side of thedielectric fin structure 206 are collectively referred to as “RRAM layer206-L”; the patterned second capping layer 228′, variable resistivematerial layer 226′, and first capping layer 224′ that are separated atthe right-hand side of the dielectric fin structure 206 are collectivelyreferred to as “RRAM layer 206-R”; the patterned second capping layer228′, variable resistive material layer 226′, and first capping layer224′ that are separated at the left-hand side of the dielectric finstructure 208 are collectively referred to as “RRAM layer 208-L”; thepatterned second capping layer 228′, variable resistive material layer226′, and first capping layer 224′ that are separated at the right-handside of the dielectric fin structure 208 are collectively referred to as“RRAM layer 208-R”; the patterned second capping layer 228′, variableresistive material layer 226′, and first capping layer 224′ that areseparated at the left-hand side of the dielectric fin structure 210 arecollectively referred to as “RRAM layer 210-L”; and the patterned secondcapping layer 228′, variable resistive material layer 226′, and firstcapping layer 224′ that are separated at the right-hand side of thedielectric fin structure 210 are collectively referred to as “RRAM layer210-R”.

In some embodiments, the exposure process of the top surfaces 206T to210T may include: a polishing process (e.g., a chemical-mechanicalpolishing (CMP) process) performed on respective portions of thedielectric layer 232, the isolation layer 230, the patterned secondcapping layer 228′, the patterned variable resistive material layer226′, and the patterned first capping layer 224′ until the top surfaces206T to 210T are respectively exposed; and a cleaning process.

Corresponding to operation 120 of FIG. 1B, FIG. 2J is a cross-sectionalview of the RRAM device 200 including a plurality of recessed regions234-1, 234-2, 234-3, 234-4, 234-5, and 234-6, which are formed, at oneof the various stages of fabrication, according to some embodiments. Asshown, the plurality of recessed regions 234-1 to 234-6 are formedwithin the dielectric layer 232 and the isolation layer 230. Morespecifically, in some embodiments, forming the recessed region 234-1 to234-6 may re-expose an upper sidewall of each of the vertical portions228′-1 of the patterned second capping layer 228′.

In some embodiments, the recessed regions 234-1 to 234-6 are formed byperforming at least some of the following processes: forming an optionalanti-reflective coating (ARC) layer over the substrate; forming apatternable layer 236 (e.g., a photoresist layer) with plural openings237 as shown in FIG. 2J; while using the patternable layer 236 as amask, perfoiining one or more dry etching processes to remove pluralupper portions of the isolation layer 232; and removing the patternablelayer 236.

Corresponding to operation 122 of FIG. 1B, FIG. 2K is a cross-sectionalview of the RRAM device 200 including a plurality of upper electrodes240-1, 240-2, 240-3, 240-4, 240-5, and 240-6, which are formed, at oneof the various stages of fabrication, according to some embodiments. Insome embodiments, the upper electrodes 240-1 to 240-6 may be formed byrefilling the respective recessed regions 234-1 to 234-6 (FIG. 2J) by ametal material (e.g., copper (Cu)). In some embodiments, each of theupper electrodes 240-1 to 240-6 may be coupled to one of the “RRAMlayers”, e.g., 206-L, 206-R, 208-L, 208-R, 210-L, or 210-R. Morespecifically, each of the upper electrodes 240-1 to 240-6 may be coupledto a respective vertical portion 226′-1 of a patterned variableresistive material layer 226′ contained in each RRAM layer. In oneembodiment, the RRAM device 200 is substantially coplanar with the topsurfaces of the upper electrodes 240-1 to 240-6.

For example, the upper electrode 240-1 is coupled to the verticalportion 226′-1 of the patterned variable resistive material layer 226′contained in the RRAM layer 206-L; the upper electrode 240-2 is coupledto the vertical portion 226′-1 of the patterned variable resistivematerial layer 226′ contained in the RRAM layer 206-R; the upperelectrode 240-3 is coupled to the vertical portion 226′-1 of thepatterned variable resistive material layer 226′ contained in the RRAMlayer 208-L; the upper electrode 240-4 is coupled to the verticalportion 226′-1 of the patterned variable resistive material layer 226′contained in the RRAM layer 208-R; the upper electrode 240-5 is coupledto the vertical portion 226′-1 of the patterned variable resistivematerial layer 226′ contained in the RRAM layer 210-L; and the upperelectrode 240-6 is coupled to the vertical portion 226′-1 of thepatterned variable resistive material layer 226′ contained in the RRAMlayer 210-R.

Further, in some embodiments, any two adjacent upper electrodes 240-1 to240-6 are laterally spaced apart from each other (e.g., electricallyisolated) by either one of dielectric fin structures 206 to 210, or thedielectric layer 232. For example, the upper electrodes 240-1 and 240-2are laterally spaced apart from each other by the dielectric finstructures 206; the upper electrodes 240-2 and 240-3 are laterallyspaced apart from each other by the dielectric layer 232; the upperelectrodes 240-3 and 240-4 are laterally spaced apart from each other bythe dielectric fin structures 208; the upper electrodes 240-4 and 240-5are laterally spaced apart from each other by the dielectric layer 232;and the upper electrodes 240-5 and 240-6 are laterally spaced apart fromeach other by the dielectric fin structures 210.

As such, a plurality of RRAM resistors may be formed. In the illustratedembodiment of FIG. 2K, a 1^(st) RRAM resistor is formed by the RRAMlayer 206-L, the upper electrode 240-1, and the conductive feature 204,which serves as the bottom electrode of the 1^(st) RRAM resistor (andother laterally spaced RRAM resistors), as described above. Morespecifically, the upper electrode 240-1 is coupled to the verticalportion 226′-1 of the patterned variable resistive material layer 226′contained in the RRAM layer 206-L, and the bottom electrode 204 iscoupled to the horizontal portion 226′-2 of the patterned variableresistive material layer 226′ contained in the RRAM layer 206-L.Similarly, a 2^(nd) RRAM resistor is formed by the RRAM layer 206-R, theupper electrode 240-2, and the conductive feature (bottom electrode)204; a 3^(rd) RRAM resistor is formed by the RRAM layer 208-L, the upperelectrode 240-3, and the conductive feature (bottom electrode) 204; a4^(th) RRAM resistor is formed by the RRAM layer 208-R, the upperelectrode 240-4, and the conductive feature (bottom electrode) 204; a5^(th) RRAM resistor is formed by the RRAM layer 210-L, the upperelectrode 240-5, and the conductive feature (bottom electrode) 204; a6^(th) RRAM resistor is formed by the RRAM layer 210-R, the upperelectrode 240-6, and the conductive feature (bottom electrode) 204.

It is noted that by using the method 100 to form the plurality of RRAMresistors, any two adjacent ones of the plurality of RRAM resistors aremirror-symmetric over one of the dielectric fin structures 206, 208, and210. For example, the 1^(st) and 2^(nd) RRAM resistors aremirror-symmetric over the dielectric fin structure 206; the 3^(rd) and4^(th) RRM resistors are mirror-symmetric over the dielectric finstructure 208; and the 5^(th) and 6^(th) RRAM resistors aremirror-symmetric over the dielectric fin structure 210. Specifically,the respective first capping layers, variable resistive material layers,and second capping layers of the 1^(st) and 2^(nd) RRAM resistors aremirror-symmetric over the dielectric fin structure 206; the respectivefirst capping layers, the variable resistive material layers, and thesecond capping layers of the 3^(rd) and 4^(th) RRAM resistors aremirror-symmetric over the dielectric fin structure 208; and therespective first capping layers, the variable resistive material layers,and the second capping layers of the 5^(th) and 6^(th) RRAM resistorsare mirror-symmetric over the dielectric fin structure 210.

In some embodiments, at a circuit-design level, the common bottomelectrode 204 may be coupled to a bit line (BL), and the upperelectrodes 240-1 to 240-6 that belong to respective different RRAMresistors are each coupled to a respective transistor, which is alsoknown as a selection transistor. As such, plural 1-transistor-1-resistor(1T1R) RRAM bit cells may be fat med.

FIG. 3 illustrates an RRAM device 300 including plural such 1T1R RRAMbit cells. In particular, the RRAM device 300 of FIG. 3 is reproducedfrom the RRAM device 200 of FIG. 2K, but the RRAM device 300 furtherincludes plural selection transistors 302, 304, 306, 308, 310, and 312.More specifically, in some embodiments, the 1^(st) RRAM resistor iscoupled to a BL 314 through the common bottom electrode 204, and coupledto a drain or source feature of the selection transistor 302 through theupper electrode 240-1, which forms a 1^(st) 1T1R RRAM bit cell.Similarly, the 2^(nd) RRAM resistor is coupled to the BL 314 through thecommon bottom electrode 204, and coupled to a drain or source feature ofthe selection transistor 304 through the upper electrode 240-2, whichforms a 2^(nd) 1T1R RRAM bit cell; the 3^(rd) RRAM resistor is coupledto the BL 314 through the common bottom electrode 204, and coupled to adrain or source feature of the selection transistor 306 through theupper electrode 240-3, which forms a 3^(rd) 1T1R RRAM bit cell; the4^(th) RRAM resistor is coupled to the BL 314 through the common bottomelectrode 204, and coupled to a drain or source feature of the selectiontransistor 308 through the upper electrode 240-4, which forms a 4^(th)1T1R RRAM bit cell; the 5^(th) RRAM resistor is coupled to the BL 314through the common bottom electrode 204, and coupled to a drain orsource feature of the selection transistor 310 through the upperelectrode 240-6, which forms a 5^(th) 1T1R RRAM bit cell; and the 6^(th)RRAM resistor is coupled to the BL 314 through the common bottomelectrode 204, and coupled to a drain or source feature of the selectiontransistor 312 through the upper electrode 240-6, which forms a 6^(th)1T1R RRAM bit cell.

Although, in FIG. 3, the selection transistors 302 to 312 areillustrated as being disposed above tiers where the common bottomelectrode 204 is formed (hereinafter “1^(st) tier’) and the plural RRAMresistors are formed (hereinafter “2^(nd) tier”), it is merely forillustration purposes. In some embodiments, such selection transistors302 to 312 may be formed below the 1^(st) and 2^(nd) tiers.

As mentioned above, in existing RRAM devices and methods forming thesame, a maximum number of RRAM bit cells that can be integrated within agiven area is limited because the active area of the variable resistivematerial layer of each existing RRAM bit cell typically extends inparallel with respective top/bottom electrodes. In stark contrast, thevariable resistive material layer of the RRAM bit cell of the disclosedRRAM device (e.g., 200/300) is formed to have vertical and horizontalportions, which allows a respective active area of the variableresistive material layer to extend along more than one direction. Assuch, a maximum number of RRAM bit cells that can be integrated into a“row” of the disclosed RRAM device (e.g., 200/300) can be substantiallyincreased. Further, plural such rows can be repeatedly formed tointegrate more RRAM bit cells into the disclosed RRAM device (e.g.,200/300). As such, a total number of RRAM bit cells that can beintegrated into the disclosed RRAM device (e.g., 200/300) can be furtherincreased.

FIG. 4 illustrates a top view of an RRAM device 400 including aplurality of the above-mentioned integrated RRAM bit cells, inaccordance with some embodiments. It is noted that the top view of FIG.4 is simplified for illustration purposes such that only top views ofrespective RRAM resistors of the plurality of RRAM bit cells are shown.In the illustrated embodiment of FIG. 4, the RRAM device 400 includesplural RRAM units 400-1, 400-2, 400-3, 400-4, 400-4, 400-5, and 400-6,each of which includes at least two RRAM resistors. As shown, the RRAMunits 400-1 and up to 400-3 are arranged along a first row, and aplurality of such rows (e.g., a row formed by RRAM units 400-4 and up to400-6) can be repeatedly disposed across the RRAM device 400.

Each RRAM unit includes at least two disclosed RRAM resistors. Takingthe RRAM unit 400-1 as an example, the RRAM unit 400-1 includes RRAMresistors 401 and 403, each of which is substantially similar to the1^(st), 2^(nd), 3^(rd), 4^(th), 5^(th), and 6^(th) RRAM resistorsdescribed with respect to FIGS. 2A-2K. In particular, the RRAM resistors401 and 403 are laterally spaced apart by a dielectric fin structure 405(substantially similar to the dielectric fin structures 206, 208, and210). The RRAM resistor 401 is formed by a variable resistive materiallayer 407 (substantially similar to the patterned variable resistivematerial layers 226′), first and second capping layers 409 and 411(substantially similar to the patterned first and second capping layers224′ and 228′, respectively), an upper electrode 413 (substantiallysimilar to the upper electrodes 240-1 to 240-6), and a common bottomelectrode 414 (substantially similar to the common bottom electrode204). Similarly, the RRAM resistor 403 is formed by a variable resistivematerial layer 417, first and second capping layers 419 and 421, anupper electrode 423, and the common bottom electrode 414.

FIG. 5 illustrates an alternative structure of the RRAM device 200 asshown in FIG. 2K. For clarity, the alternative structure of the RRAMdevice 200 is herein referred to as a “RRAM device 500.” As shown, theRRAM device 500 is substantially similar to the RRAM device 200 exceptthat each of the patterned second capping layers 228′ has only therespective vertical portion 228′-1.

In an embodiment, a memory cell includes: a resistive material layercomprising a first portion that extends along a first direction and asecond portion that extends along a second direction, wherein the firstand second directions are different from each other; a first electrodecoupled to a bottom surface of the first portion of the resistivematerial layer; and a second electrode coupled to the second portion ofthe resistive material layer.

In another embodiment, a memory device includes: a first resistivematerial layer and a second resistive material layer that are laterallyspaced from each other by a dielectric structure, wherein the first andsecond resistive material layers each comprises a horizontal portion anda vertical portion, and wherein the vertical portions of the first andsecond resistive material layers each extends along a respectivesidewall of the dielectric structure, and the horizontal portions of thefirst and second resistive material layers extend toward oppositedirections.

In yet another embodiment, a memory device includes: a plurality ofdielectric structures laterally spaced from one another; and a pluralityof pairs that each comprises first and second resistive material layers,wherein the first and second resistive material layers of each of theplurality of pairs are mirror-symmetric over one of the plurality ofdielectric structures, and respective vertical portions of the first andsecond resistive material layers each extends along a sidewall of theone of the plurality of dielectric structures, and respective horizontalportions of the first and second resistive material layers each extendsaway from the one of the plurality of dielectric structures.

The foregoing outlines features of several embodiments so that thoseordinary skilled in the art may better understand the aspects of thepresent disclosure. Those skilled in the art should appreciate that theymay readily use the present disclosure as a basis for designing ormodifying other processes and structures for carrying out the samepurposes and/or achieving the same advantages of the embodimentsintroduced herein. Those skilled in the art should also realize thatsuch equivalent constructions do not depart from the spirit and scope ofthe present disclosure, and that they may make various changes,substitutions, and alterations herein without departing from the spiritand scope of the present disclosure.

What is claimed is:
 1. A memory cell, comprising: a resistive materiallayer comprising a first portion that extends along a first directionand a second portion that extends along a second direction, wherein thefirst and second directions are different from each other; a firstelectrode coupled to a bottom surface of the first portion of theresistive material layer; and a second electrode coupled to the secondportion of the resistive material layer.
 2. The memory cell of claim 1,wherein the first and second directions are substantially perpendicularto each other.
 3. The memory cell of claim 1, wherein the resistivematerial layer presents a variable resistance value.
 4. The memory cellof claim 1, wherein the first and second electrodes are in parallel toeach other, and each extends along the first direction.
 5. The memorycell of claim 1, further comprising: a first capping layer comprising atleast a portion that is coupled between the first electrode and thefirst portion of the resistive material layer; and a second cappinglayer comprising at least a portion that is coupled between the secondportion of the resistive material layer and the second electrode.
 6. Thememory cell of claim 5, wherein the portion of the first capping layerextends along the first direction, and the portion of the second cappinglayer each extends along the second direction.
 7. The memory cell ofclaim 1, further comprising: a transistor, wherein the second electrodeis coupled to a drain feature or a source feature of the transistor. 8.A memory device, comprising: a first resistive material layer and asecond resistive material layer that are laterally spaced from eachother by a dielectric structure, wherein the first and second resistivematerial layers each comprises a horizontal portion and a verticalportion, and wherein the vertical portions of the first and secondresistive material layers each extends along a respective sidewall ofthe dielectric structure, and the horizontal portions of the first andsecond resistive material layers extend toward opposite directions. 9.The memory device of claim 8, further comprising: a first electrodecoupled to a bottom surface of the horizontal portions of the first andsecond resistive material layers; a second electrode coupled to thevertical portion of the first resistive material layer; and a thirdelectrode coupled to the vertical portion of the first resistivematerial layer.
 10. The memory device of claim 9, wherein the first,second, and third electrodes are in parallel to one another.
 11. Thememory device of claim 9, wherein the second and third electrodes areisolated from each other by at least the dielectric structure.
 12. Thememory device of claim 9, further comprising: a first transistor,wherein the second electrode is coupled to a drain feature or a sourcefeature of the first transistor; and a second transistor, wherein thethird electrode is coupled to a drain feature or a source feature of thesecond transistor.
 13. The memory device of claim 9, wherein the firstresistive material layer, the first electrode, and the second electrodeform a first resistive random access memory (RRAM) resistor, and thesecond resistive material layer, the first electrode, and the thirdelectrode form a second RRAM resistor.
 14. The memory device of claim13, wherein the first RRAM resistor further comprises: a first cappinglayer comprising at least a portion that is coupled between the firstelectrode and the horizontal portion of the first resistive materiallayer; and a second capping layer comprising at least a portion that iscoupled between the vertical portion of the first resistive materiallayer and the second electrode.
 15. The memory device of claim 13,wherein the second RRAM resistor further comprises: a first cappinglayer comprising at least a portion that is coupled between the firstelectrode and the horizontal portion of the second resistive materiallayer; and a second capping layer comprising at least a portion that iscoupled between the vertical portion of the second resistive materiallayer and the third electrode.
 16. The memory device of claim 8, whereinthe first and second resistive material layers each presents arespective variable resistance value.
 17. A memory device, comprising: aplurality of dielectric structures laterally spaced from one another;and a plurality of pairs, each pair comprising first and secondresistive material layers, wherein the first and second resistivematerial layers of each of the plurality of pairs are mirror-symmetricover one of the plurality of dielectric structures, and respectivevertical portions of the first and second resistive material layers eachextends along a sidewall of the one of the plurality of dielectricstructures, and respective horizontal portions of the first and secondresistive material layers each extends away from the one of theplurality of dielectric structures.
 18. The memory device of claim 17,further comprising: a lower electrode coupled to the respectivehorizontal portions of the first and second resistive material layers ofeach of the plurality of pairs, wherein the lower electrode is inparallel with the respective horizontal portions of the first and secondresistive material layers of each of the plurality of pairs.
 19. Thememory device of claim 17, wherein the respective vertical portions ofthe first and second resistive material layers of each of the pluralityof pairs are coupled to respective different upper electrodes, and therespective different upper electrodes are in parallel with therespective horizontal portions of the first and second resistivematerial layers of each of the plurality of pairs.
 20. The memory deviceof claim 17, wherein the first and second resistive material layers ofeach of the plurality of pairs each presents a respective variableresistance value.